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PDF] Study on Uniform Plasma Generation Mechanism of Electron Cyclotron Resonance Etching Reactor | Semantic Scholar
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Preparation of positive LiCoO2 films by electron cyclotron resonance (ECR) plasma sputtering method and its application to all-solid-state thin-film lithium batteries - ScienceDirect
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Color online) Schematic of the Electron-Cyclotron Plasma Reactor used... | Download Scientific Diagram
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Effect of H2 addition on SiCN film growth in an electron cyclotron resonance plasma chemical vapor deposition reactor - Journal of Materials Chemistry (RSC Publishing) DOI:10.1039/A908523H
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